hermal Evaporation

DTE is equipped with a high current power supply and low-voltage (resistive) thermal evaporation platform suitable for a wide variety of thermal evaporation applications. The system allows controlled thermal evaporation of a wide range of materials onto the substrate. Different types of thermal evaporation sources (boat, basket, and coil) can be installed on the single thermal source holder.

The system is equipped with a 1.2 kW high-current DC power supply. The system can deposit a thin layer of the evaporant material on different surfaces for different applications, such as SEM sample preparation.

Features of DTE

Hardware

• Material evaporation semi-automatic control.
• Equipped with a separate DC high-current power supply (max. 12V, 100A).
• 170 mm diameter Borosilicate-SST vacuum chamber.
• High vacuum level with built-in turbo pump (Leybold 90 l/s).
• Two-stage rotary (optional diaphragm or scroll) backing pump.
• Quartz crystal monitoring system for real time thickness measurement (1 nm precision).
• Electronic shutter.
• Two high-current electric feed-throughs for thermal source insertion.
• Movable thermal source holder with possible upward or downward deposition configurations.
• Automatic venting valve.
• Full range vacuum gauge.
• S-Clip sample holder on the chamber lead.
• 2-inch rotating sample holder on the base plate (optional).
• Sample rotation, height and tilt adjustable (for optional 2-inch sample holder)

Automation

• Intuitive touch screen to control the vacuum process and device manipulation
• User friendly software, updatable via network
• Electronic shutter

• The vacuum chamber is with 170 mm OD and 140 mm H.
• The DTE is fitted with an internally mounted 90 L/s turbo molecular pump, backed by a 6m3/h two-stage rotary vane pump (optional).

Touch Screen Control

DTE is equipped with a 7” colored touch-screen panel using user-friendly software to control the deposition process data. The vacuum and coating sequence information can be observed as digital data or curves on the touch screen and the last 300 coatings are saved on the history page.

Sample Holders

DTE deposition system enables metal evaporation in upward and downward configurations.

• Upward deposition: The material is loaded in a boat source and the sample is attached to the S-Clips on the chamber lead to allow easy access.
• Downward deposition: A small amount of desired material is loaded in the basket with rotating sample holder (optional) on the baseplate.

DTE Operation Requirements

DTE is a deposition system with a small chamber, making it a compact, light-weight, quick- vacuuming, and low-budget coating device. Although, due to its small chamber, there are some advisory notes regarding this device:

• DTE is ideal for short-term  thin film coatings, whereas long-term thick layer depositions may damage the chamber.
• The device is ideal for deposition of source materials with low vaporization temperature.
• The maximum sample diameter could not exceed 2 inches for rotating substrate holder.

If these coating conditions do not suit your purpose, you can try our DTT model with a large 300 mm Dia. Chamber and three-thermal sources.

Applications

• Metal thin Films
• Nano & Microelectronic
• Solar cell applications
• Thin film sensors
• Fine grain structural deposition for SEM & FE-SEM sample preparation
• Carbon fiber evaporation in flash mode for SEM sample preparation