產品介紹∣全凱爾文探針(KelvinProbe)系統

描述

Complete Kelvin Probe是 Instytut Fotonowy 的一項發明，它解決了 Kelvin 探針 150 年來的老問題：如果您觀察到 CPD 變化，您不知道這是樣品的功函數(Work Function)變化，還是探針尖功函數(Work Function) 的變化。完整凱爾文探針(KelvinProbe)系統是一款終極接觸電位差 (CPD) 測量裝置。它可以執行其它凱爾文探針所能執行的任何功能，而且還可以測量 :

樣品相對於接地的 CPD
探針尖相對於接地的 CPD

這可讓使用者清楚看到樣品-探針尖 CPD 的貢獻來自於樣品，以及探針尖的貢獻。

工作中的完整凱爾文探針

樣品-探針尖的 CPD

樣品尖端接觸電位差（藍色）與記錄的環境空氣溫度（綠色）和相對濕度（橘色）：

樣品-接地 CPD

樣品-接地接觸電位差（紅色）與記錄的環境空氣溫度（綠色）和相對濕度（橙色）。
它只代表樣品-探針尖變化的一小部分：

探針尖-接地 CPD
探針尖與接地的接觸電位差（金色）與記錄的環境空氣溫度（綠色）和相對濕度（橘色）。
這顯示大部分的 CPD 變化都是由於探針尖表面的變化：

凱爾文探針模組

凱爾文探針組包含：

控制器裝置
帶有探針尖的凱爾文探針儀器
法拉第籠

凱爾文探針儀器配備：

保護槽，可在實驗後停放探針
雷射指示器直接指示區域，當儀器被法拉第籠覆蓋時，有助於處理樣品的光源
精確偵測探針尖與樣品距離的雷射屏障
金探針尖
樣品支架
電動 XY 工作平台。

探針尖

凱爾文探針系統最重要的部分是探針尖。參考電極由直徑 2.5 mm 的金網格製成。
即使在樣品上方 0.5 mm 的距離，它也能提供高雜訊比。因此，無論被檢測的樣品
表面是粗糙或拋光都無關緊要。探針尖的擺動是由電磁鐵產生的。

探針尖是完全由 Instytut Fotonowy Sp. z o.o. 設計和製造的元件。


樣品支架標準凱爾文探針組包含兩種樣品支架：底部接觸支架，適用於導電基板上的樣品	適用於非導電基板的頂部接觸座

法拉第籠整個儀器被法拉第籠所覆蓋，可將裝置與環境光線和電場隔離。
氣密型法拉第籠與惰性氣體流動系統由於 CPD 測量通常對環境因素（如溫度、濕度、灰塵和化學污染物）非常敏感，因此凱爾文探針可放置在帶有惰性氣流系統的密封型法拉第籠內。
雷射屏障凱爾文探針系統配備了雷射屏障系統。系統會自動偵測樣品基板。每次探針接近被檢測的樣品時，都會以 20 µm 的精度測量樣品表面與探針尖之間的精確距離。
樣品照明在測量過程中，樣品可能會被位於探針尖上方的光纖照亮。探針頭會讓光線穿過。光纖輸入端的光源可由 LED 迴轉燈、結合單色光的氙燈或任何其它類型的光源提供。

由於儀器的不斷發展，以下參數可能會有所改變
電壓範圍	-5 V .. 5 V
電壓測量標準解析度	0.15 mV
測量技術	雙通道鎖相增強
樣品架	X-Y位移平臺，手動（預設）或電動
X-Y軸衝程	15 mm x 15 mm
提示類型	網格，直徑2.5 mm
Z定位	Z級電動
相對於樣本的定位	擋光板
Z定位解析度	10 µm
Spectral range for wave guides	200 nm .. 2000 nm（取決於波導）
液體波導的選擇（Lumatec）
輔助感測器	濕度和溫度
內部法拉第籠照明	白色 LED
X-Y定位輔助設備	激光放樣儀
電腦連接	USB 2.0
尺寸	40 x 40 x 45 cm
重量	10 kg

Description
Complete Kelvin Probe is an invention of Instytut Fotonowy that solves the 150 years old problem with Kelvin Probes: If you observe a CPD change, you don’t know whether it is a change of the sample’s Work Function or the change of the WF of the tip.
Complete Kelvin Probe is an ultimate Contact Potential Difference (CPD) measuring device. It can do whatever other Kelvin Probes can do but it also can measure

CPD of a sample with respect to the ground,
CPD of the tip with respect to the ground.

That lets the user clearly see what contribution to the sample-tip CPD comes from the sample and what from the tip.

Complete Kelvin Probe at work

Sample-Tip CPD
Sample-Tip Contact Potential Difference (blue) with recorded ambient air temperature (green) and relative humidity (orange):

Sample-ground CPD
Sample-ground Contact Potential Difference (red) with recorded ambient air temperature (green) and relative humidity (orange). It represents only small fraction of the sample-tip variation:

Tip-ground CPD
Tip-ground Contact Potential Difference (gold) with recorded ambient air temperature (green) and relative humidity (orange). It shows that most of the CPD change is due to the change on the tips surface:

kelvin probe modules

The Kelvin Probe set consists of:

Controller unit,
Kelvin Probe instrument with the Probe Tip,
Faraday Cage.

The Kelvin Probe instrument is equipped with:

Protective bay to park the Probe Tip after experiment,
Laser pointer to indicate the area directly,
Light source that helps to handle the sample when the instrument is covered with the Faraday Cage,
Laser barrier to precisely detect the Probe Tip distance to the sample,
Golden Probe Tip,
Sample holder,
Motorized XY Table.

Probe Tip
The most important part of the Kelvin Probe instrument is the Probe Tip. The reference electrode is made of Au mesh of 2.5 mm in diameter. It provides high signal to noise ratio, even from a distance of 0.5 mm above the sample. Thus, it does not matter if the examined sample surface is rough or polished. The tip oscillations are generated with an electromagnet.

The Probe Tip is the component fully designed and manufactured by Instytut Fotonowy Sp. z o.o.

Sample holders
The standard Kelvin Probe Set includes two types of sample stands:

Bottom contact stand for samples on conducting substrates,

Top contact stand for non-conducting substrates,

Faraday Cage The entire instrument is covered with the Faraday Cage, shielding the setup from the ambient light and electromagentic fields.
Gas-tight Faraday Cage with inert gas flow system Scince measurements of the CPD is often sensitive to environmental factors such as temperature, humidity, dust and chemical contaminants, Kelvin Probe may be placed inside the hermetic version of the Faraday Cage with the inert gas flow system.
Laser barrier The Kelvin Probe is equipped with the Laser barrier system. The system automatically detects the sample substrate. Each time the probe approaches the sample being examined, an accurate distance between the sample surface and the Probe Tip is measured with 20 µm precision.
Sample illumination The sample may be illuminated during the measurements from the optical fiber situated above the Probe Tip. The Probe Tip lets the light through. The light at optical fiber input may be provided by the LED Revolver, Xenon Lamp combined with the Monochromator or any other type of the light source desired.

Voltage range	-5 V .. 5 V
Voltage measurement nominal resolution	0.15 mV
Measurement technology	2-channel lock-in amplifier
Sample holder	translation stage X-Y, manual (default) or motorized
X-Y stage stroke	15 mm x 15 mm
Tip type	Au mesh, dia. 2.5 mm
Tip Z positioning	motorized Z stage
Positioning with respect to a sample	light barrier
Tip Z positioning resolution	10 µm
Spectral range for wave guides	200 nm .. 2000 nm (depending on a waveguide)
Liquid waveguides selection (Lumatec)
Auxiliary sensors	humidity and temperature
Internal Faraday cage illumination	white LED
X-Y positioning aid	laser sample placement indicator
PC connectivity	USB 2.0
Size	40 x 40 x 45 cm
Weight	10 kg