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掃描式凱爾文探針
Scanning Kelvin Probe

【Instytut Fotonowy】光電光譜儀 半導體特性分析儀器

掃描式凱爾文探針

簡介

Scanning Kelvin Probe

研究樣品的表面狀態
專用於量測接觸電位差和樣品表面的電荷分佈

我要諮詢

 

描述 

掃描式凱爾文探針不僅可以測量樣品的單點接觸電勢差 (CPD),還可以掃描整個樣品表面。配備光源的凱爾文探針可檢測樣品中電子的表面狀態。電子的表面狀態在電荷轉移中扮演重要的角色,這對於光電材料和光電化學來說尤其重要。掃描樣品表面並檢查其電性的可能性可精確評估材料的品質、均勻性等。針對樣品的許多點所收集的一系列 CPD 值,可用來更精確地評估功函數(Work Function)
 

靜電電壓計
 
測量技術、應用的分析方法以及儀器的設計,使該儀器在測試帶電介質表面(包括積聚電荷上方的測量電勢可能大至數千伏的介質)方面獨一無二、無與倫比!
 
掃描式凱爾文探針系統可進行以下研究:
  • 材料的功函数
  • 費米能階相對於傳導帶和價帶邊緣的位置
  • 半導體的類型 (n或p)
  • 半導體的能隙
  • 表面電位(SPV,採用平帶技術)
  • 表面吸附和化學吸附對功函數的影響
  • 關於表面狀態密度的資訊
  • 表面充電與放電效應
  • 少數載流子擴散長度
  • 載流子重組率(特別是間接帶隙半導體)
  • 有關埋底介面的信息
  • 溫度對功函數的影響
  • 濕度對功函數的影響
  • 表面的靜電荷分佈

凱爾文​探針模組​

凱爾文探針組包含 :
 
  • 控制器裝置
  • 帶有探針尖的凱爾文探針儀器
  • 法拉第籠   
凱爾文探針儀器配備:
 
  • 保護槽,可在實驗後停放探針
  • 雷射指示器直接指示區域,當儀器被法拉第籠覆蓋時,有助於處理樣品的光源
  • 精確偵測探針尖與樣品距離的雷射屏障
  • 金探針尖
  • 樣品支架
  • 電動 XY 工作平台。                                                  

探針尖

凱爾文探針系統最重要的部分是探針尖。參考電極由直徑 2.5 mm 的金網格製成。
即使在樣品上方 0.5 mm 的距離,它也能提供高雜訊比。因此,無論被檢測的樣品
表面是粗糙或拋光都無關緊要。探針尖的擺動是由電磁鐵產生的。

探針尖是完全由 Instytut Fotonowy Sp. z o.o. 設計和製造的元件。

樣品支架
標準凱爾文探針組包含兩種樣品支架:
  • 底部接觸支架,適用於導電基板上的樣品      
  • 適用於非導電基板的頂部接觸座

 

樣品支架
標準凱爾文探針組包含兩種樣品支架:
底部接觸支架,適用於導電基板上的樣品     用於非導電基板的頂部接觸支架  

法拉第籠
整個儀器被 Faraday Cage 所覆蓋,可將裝置與環境光線和電場隔離。   

氣密型法拉第籠與惰性氣體流動系統
由於 CPD 測量通常對環境因素(如溫度、濕度、灰塵和化學污染物)
非常敏感,因此 開爾文探針可放置在帶有惰性氣流系統的密封型法拉
第籠內。   

 

雷射屏障
凱爾文探針系統配備了雷射屏障系統。系統會自動偵測樣品基板。每次探針接近被檢測的樣品時,都會以 20 µm 的精度測量樣品表面與探針尖之間的精確距離。

樣品照明

在測量過程中,樣品可能會被位於探針尖上方的光纖照亮。探針頭會讓光線穿過。光纖輸入端的光源可由 LED 迴轉燈、結合單色光的氙燈或任何其它類型的光源提供。

根據設備開發的進程,以下規格可能會有所改變。
概述:
  • 重量:15公斤
  • 尺寸:40x40x45 cm
  • PC連接:USB 2.0
  • 電源:230 V,50 Hz 或 115 V,60 Hz
  • 測量技術:2通道鎖相放大器,
  • 雷射屏障自動檢測基板並防止探針尖端撞擊樣品
  • 輔助感測器:濕度、溫度
  • 小燈,
  • 雷射指示器用於指示待測表面點
  • 樣品夾具:
    • 自由形狀的固態頂端接觸夾具
    • 底部接觸夾具
    • 電化學夾具
法拉第籠:
  • 標準型 / 氣密型帶惰性氣體流動系統
測量單元:
  • 偏置電壓範圍:-5 ÷ 5 V,
  • 電壓測量解析度:0.15 mV,
  • 電流範圍:300 nA,30 nA,3 nA,300 pA,
探針尖:
  • 探針尖端類型:金網,直徑2.5 mm
  • 垂直軸上的定位解析度:20 μm
  • 自動共振頻率掃描
  • 可調節的振動幅度
  • 自動去除探針尖的寄生電流
  • 部分透明光
  • 典型的CPD測量距離:0.2 – 1mm
XY平臺:
  • 電動,通過軟體控制
  • 尺寸:50 x 50 mm
  • 移動範圍:50 x 50 mm

 

Description
Scanning Kelvin Probe allows to measure the Contact Potential Difference (CPD) not only in a single point of the sample but the entire sample surface may be scanned.
Kelvin Probe equipped with a light source enables to examine surface states of electrons in the sample. Surface states of electrons play a significant role in electric charge transfer, which is especially important for photovoltaic materials and in photoelectrochemistry.
Possibility of scanning the sample surface and to examine its electrical properties enables precise assessment of the quality of the material, its homogeneity, etc. The series of CPD values collected for many points of the sample, may be used to evaluate Work Function more precisely.

Electrostatic Voltmeter
The measurement technique, analytic methods applied and the design of the instrument makes the instrument unique and peerless in testing charged dielectric surfaces, including dielectrics where the measured potential above the accumulated charges may be as large as several kilovolts!

Scanning Kelvin Probe system enables to investigate:
  • The Work Function of a material,
  • Position of Fermi level with respect to the conduction and valence band edges,
  • The type, n or p, of a semiconductor,
  • Energy gap of a semiconductor,
  • Surface potential (SPV by flat band technique),
  • Surface adsorption and chemisorption effects on the Work Function,
  • Information on the surface states density,
  • Surface charging and discharging effects,
  • Minority carriers diffusion length,
  • Carrier recombination rates (especially for indirect bandgap semiconductors),
  • Information on buried interfaces,
  • Temperature influence on the Work Function,
  • Humidity influence on the Work Function,
  • Electrostatic charge distribution over the surface.

kelvin probe modules


The Kelvin Probe set consists of:

  • Controller unit,
  • Kelvin Probe instrument with the Probe Tip,
  • Faraday Cage.

The Kelvin Probe instrument is equipped with:

  • Protective bay to park the Probe Tip after experiment,
  • Laser pointer to indicate the area directly,
  • Light source that helps to handle the sample when the instrument is covered with the Faraday Cage,
  • Laser barrier to precisely detect the Probe Tip distance to the sample,
  • Golden Probe Tip,
  • Sample holder,
  • Motorized XY Table.                               

Probe Tip
The most important part of the Kelvin Probe instrument is the Probe Tip.  The reference electrode is made of Au mesh of 2.5 mm diameter. It provides high signal to noise ratio, even from a distance of 0.5 mm above the sample. Thus, it does not matter if the examined sample surface is rough or polished. The tip oscillations are generated with an electromagnet.

The Probe Tip is the component fully designed and manufactured by Instytut Fotonowy Sp. z o.o.

Sample holders
The standard Kelvin Probe Set includes two types of sample stands:

  • Bottom contact stand for samples on conducting substrates,
  • Top contact stand for non-conducting substrates,

 

樣品支架
標準凱爾文探針組包含兩種樣品支架:
底部接觸支架,適用於導電基板上的樣品     用於非導電基板的頂部接觸支架  

Faraday Cage
The entire instrument is covered with the Faraday Cage, shielding the setup from the ambient light and electromagentic fields.

Gas-tight Faraday Cage with inert gas flow system
Scince measurements of the CPD is often sensitive to environmental factors like temperature, humidity, dust and chemical contaminants, Kelvin Probe may be placed inside the hermetic version of the Faraday Cage with the inert gas flow system.

 

Laser barrier
The Kelvin Probe is equipped with the Laser barrier system. System automatically detects the sample sub-
strate. Each time the probe approaches the sample being examined, an accurate distance between the sample surface and the Probe Tip is measured with 20 µm precision.

Sample illumination
The sample may be illuminated during the measurements from the optical fiber situated above the Probe Tip. The Probe Tip lets the light through. The light at optical fiber input may be provided by the LED Revolver, Xenon Lamp combined with the Monochromator or any other type of the light source desired.

General:

  • Weight: 10 kg,
  • Size: 40x40x45 cm,
  • PC connectivity: USB 2.0,
  • Power supply: 230 V, 50 Hz or 115 V, 60 Hz,
  • Measurement technique: 2-channel lock-in-amplifier,
  • Laser barrier to automatically detect the substrate and prevent the tip from running into the sample,
  • Auxiliary sensors: humidity, temperature,
  • Small lamp,
  • Laser pointer for examined point of the surface indication,
  • Sample holders:
    • Freely shaped solid state with top contact holder,
    • Bottom contact holder,
    • Electrochemical holder,

Faraday Cage:

  • Standard / gas-tight with inert gas flow system,

Measurement unit:

  • Bias voltage range: -5 ÷ 5 V,
  • Voltage measurement resolution: 0.15 mV,
  • Current ranges: 300 nA, 30 nA, 3 nA, 300 pA,

Probe Tip:

  • Probe Tip type: Au mesh, 2.5 mm in diameter,
  • Tip positioning resolution in vertical axis: 20 µm,
  • Automated resonance frequency scanning,
  • Adjustable oscillation amplitude,
  • Automated removal of the parasitic current of the tip,
  • Partial transparency for the light,
  • Typical CPD measurement distance: 0.2 – 1 mm,

XY Table:

  • Motorized, controlled via software,
  • Size: 50 x 50 mm,
  • Movement range: 50 x 50 mm,